Layer termination from ellipsometric details is entirely integrated into Aeres®. Various multi-wavelength and spectroscopic ellipsometry solutions are offered with the ion beam sputter deposition process.
In-situ optical checking and Handle is offered by Angstrom’s optical monitoring & Management package deal.
An optional cryogenic pump improves base tension and pumping speed and may be isolated from your chamber through reactive processes with oxygen.
In-situ ellipsometry gives important info on the performance of an optical movie while it truly is getting deposited.
Our Reticle® ion beam sputter deposition systems are created and engineered to produce specific optical movies of the best purity, density, and security.
Variable angle stages enable for extremely powerful slim movie techniques. On the other hand, amongst its most important problems is reproducibility. The substrate is frequently set at an exceptionally oblique angle in relation to the source, and also the films are incredibly sensitive to your precision of the angle.
Angstrom went to fantastic lengths to refine the tolerances of the lean angle, enhancing it from a variation of up to a complete degree on non-Angstrom units I’ve used to fewer than 0.
Our exclusive structure permits immediate or oblique checking from the variable angle stage, removing the necessity for tooling variables or even a witness glass changer. Find out more regarding the Optical Monitoring & Management offer listed here.
Together with sample rotation, the variable angle phase that is certainly used for Reticle® offers for in-created angular movement from the deposition flux.
The IBSD process creates a highly energetic flux of deposition materials, leading to films with enhanced density, hardness, and area roughness in comparison to Those people deposited by evaporation processes.
one diploma. Individuals splendidly narrow tolerances enable us to continuously build really specific nanostructures. I'm able to say wholeheartedly the product or service and service Angstrom Engineering® shipped continues to be astounding.
Self-aligned ion optics are configured specifically for the specified deposition requirements and geometry of your procedure.
Angstrom Engineering’s Reticle® systems supply a turn-key solution for people planning to recognize any optical structure into a large-performance movie.
A shuttered QCM located close to the substrate presents suggestions about the Zirconium and niobium supply deposition fee and Actual physical thickness of your rising film.
Considerate layout in the ion beam concentrating optics confines the beam totally to the region on the concentrate on, eradicating any danger of contamination.